01768nam 2200469 450 99619996310331620230422042140.0(CKB)111026746754392(SSID)ssj0000558524(PQKBManifestationID)12198048(PQKBTitleCode)TC0000558524(PQKBWorkID)10565556(PQKB)10296262(WaSeSS)IndRDA00123469(EXLCZ)9911102674675439220200526d1999 uy 0engur|||||||||||txtccrDigest of papers microprocesses and nanotechnology '99 : 1999 International Microprocesses and Nanotechnology Conference, July 6-8, 1999, Yokohama, Japan /sponsored by the Japan Society of Applied Physics ; technical-cosponsored by IEEE Electron Device Society ; cooperation, American Vacuum Society [and seven others]Piscataway, New Jersey :Institute of Electrical and Electronics Engineers,1999.1 online resource (234 pages)Includes index.4-930813-97-2 Integrated circuitsVery large scale integrationDesign and constructionCongressesNanotechnologyCongressesMicroelectronicsCongressesIntegrated circuitsVery large scale integrationDesign and constructionNanotechnologyMicroelectronics621.395Ōyō Butsuri Gakkai,IEEE Electron Devices Society,American Vacuum Society,WaSeSSWaSeSSPROCEEDING996199963103316Digest of papers1886461UNISA