01395nam 2200421 450 99619963780331620230421041127.0(CKB)111026746723972(SSID)ssj0000455125(PQKBManifestationID)12203235(PQKBTitleCode)TC0000455125(PQKBWorkID)10399563(PQKB)10301387(WaSeSS)IndRDA00123481(EXLCZ)9911102674672397220200528d1998 uy 0engur|||||||||||txtccrIVMC '98 11th International Vacuum Microelectronics Conference : July 19-24, 1998, The Grove Park Inn Asheville, NC, USA /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,1998.1 online resource (327 pages)Bibliographic Level Mode of Issuance: Monograph0-7803-5096-0 Vacuum technologyCongressesMicroelectronicsCongressesVacuum technologyMicroelectronics621.55Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING996199637803316IVMC '982534436UNISA