01659oam 2200433zu 450 99619930990331620210807003514.0(CKB)111055184247090(SSID)ssj0000527239(PQKBManifestationID)12179881(PQKBTitleCode)TC0000527239(PQKBWorkID)10522704(PQKB)11014088(EXLCZ)9911105518424709020160829d2001 uy engtxtccrThe 14th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001[Place of publication not identified]Institute of Electrical and Electronics Engineers2001Bibliographic Level Mode of Issuance: Monograph0-7803-5998-4 Microelectromechanical systemsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.381IEEE Robotics and Automation SocietyIEEE International Conference on Micro Electro Mechanical SystemsPQKBPROCEEDING996199309903316The 14th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2001 : Interlaken, Switzerland, January 21-25, 20012501915UNISA