01019nam--2200349---450-99000600664020331620150210125638.0978-0-521-76483-4000600664USA01000600664(ALEPH)000600664USA0100060066420150210d2013----km-y0itay50------baengUK||||||||001yyElectromechanics and MEMSThomas B. Jones, Nenad G. NenadicCambridgeCambridge University Presscopyr. 2013XX, 559 p.25 cmElettronicaBNCF621.381JONES,Thomas202860NENADIC,Nedad G.619859ITsalbcISBD990006006640203316621.381 JON 122890 Ing.621.38100330516BKTECPAOLA9020150210USA011254PAOLA9020150210USA011256Electromechanics and MEMS1079215UNISA