01344nas 2200385 450 99000348289020331620220810130115.00734-211X000348289USA01000348289(ALEPH)000348289USA0100034828920110113a19839999km-y-itay50------baengUSagazz--||||Journal of vacuum science & technology. B: Microelectronics and nanometer structures vacuum, surfaces and filmsAmerican Vacuum SocietyA.1, n.1(1983)-WashingtonAmerican Institute of Physics1983-1990volumiill.28 cmBimestrale0010003482852001Journal of vacuum science & technologyFisica tecnicaPeriodiciBNCF621.5American Vacuum SocietyITsalbcISBD990003482890203316SCIPER IV1983-1990.SEMANCUSO9020110113USA011200MANCUSO9020110127USA011110MANCUSO9020110127USA011113MANCUSO9020110202USA011232Journal of vacuum science & technology. B: Microelectronics and nanometer structures vacuum, surfaces and films1110639UNISA