01359nas 2200409 450 99000348287020331620110202123144.00734-2101000348287USA01000348287(ALEPH)000348287USA0100034828720110113a19839999km-y-itay50------baengUSagazz--||||Journal of vacuum science & technology. A: vacuum, surfaces and filmsAmerican Vacuum SocietyA.1, n.1(1983)-WashingtonAmerican Institute of Physics1983v.ill.28 cmBimestrale0010003482852001Journal of vacuum science & technologyFisica tecnicaPeriodiciBNCF621.05American Vacuum SocietyITsalbcISBD990003482870203316SCIPER IV1983-1992;1990;SEMANCUSO9020110113USA011157MANCUSO9020110113USA011158MANCUSO9020110127USA011110MANCUSO9020110127USA011112MANCUSO9020110202USA011231MANCUSO9020110202USA011231Journal of vacuum science & technology A: Vacuum, surfaces and films791402UNISA