01372nas 2200385 450 99000348285020331620220810125651.00022-5355000348285USA01000348285(ALEPH)000348285USA0100034828520110113a19749999km-y-itay50------baengUSagazz--||||Journal of vacuum science & technologyAmerican Vacuum SocietyWashingtonAmerican Institute of Physics1974-1982volumiill.28 cmComincia nel 1964Descrizione basata su: Vol.21, n.3(1982)Si scinde in: Journal of vacuum science & technology. A: vacuum, surfaces and films. - Journal of vacuum science & technology. B: Microelectronics and nanometer structures vacuum, surfaces and filmsBimestraleFisica tecnicaPeriodiciBNCF621.5American Vacuum SocietyITsalbcISBD990003482850203316SCIPER IV1974-1982.1974-1975;1976-1978;1980;SEMANCUSO9020110113USA011152MANCUSO9020110127USA011111MANCUSO9020110202USA011231Journal of vacuum science & technology791404UNISA