01601nam0-2200481---450-99000341753020331620120127111909.00-201-44494-1000341753USA01000341753(ALEPH)000341753USA0100034175320100624d2002----|||y0itay0103----baengUSa---||||001yyIntroduction to microelectronic fabricationRichard C. Jaeger2. ed.Upper Saddle RiverPrentice Hall2002XIV, 316 p.ill.23 cmModular series on solid state devices52001Modular series on solid state devices5Circuiti integratiFabbricazione621.395JAEGER,Richard C.28080ITSALBCISBD990003417530203316621.395 JAE14839 Ing.62100003421621.395 JAE 122216 Ing621.39500305952BKTECPAOLA9020100624USA011140PAOLA9020100624USA011140PAOLA9020100624USA011141PAOLA9020100624USA011202PAOLA9020100624USA011202PAOLA9020100624USA011204PAOLA9020100624USA011207PAOLA9020100624USA011207PASSARO9020120127USA011116PASSARO9020120127USA011119Introduction to microelectronic fabrication1488585UNISA