01049nam--2200349---450-99000331035020331620090915091641.0000331035USA01000331035(ALEPH)000331035USA0100033103520090915d1980----km-y0itay50------baengNL||||||||001yyFine line lithographyEdited Roger NewmanAmsterdam [etc.]North-Holland Publishing Company1980VII, 481 p.ill. graf. tab.22 cmMaterials Processing-Theory and practices12001Materials Processing-Theory and practices1Circuiti integratiLitografia621.381 73NEWMAN,RogerITsalbcISBD990003310350203316621.381 73 FIN7698/CBS681.381 7300327261BKSCIRSIAV69020090915USA010916Fine line lithography1122089UNISA