01253nam2-2200397---450-99000281108020331620090723112724.00-9616721-7-X000281108USA01000281108(ALEPH)000281108USA0100028110820060911h2002----km-y0itay50------baengUSa|||z|||001yy<<Vol. 4.>> : Deep-submicron process technologyStanley WolfSunset BeachLattice Press2002XXII, 806 p.ill.24 cm0010001567472001Silicon processing for the VLSI EraCircuiti integrati621.395WOLF,Stanley557421ITsalbcISBD990002811080203316621.395 WOL 419738 Ing.62100118568621.395 WOL 421353 Ing.62100227867621.395 WOL 421352 Ing.62100227869BKTECRENATO9020060911USA011630PAOLA9020090723USA011125PAOLA9020090723USA011125PAOLA9020090723USA011127Deep-submicron process technology994810UNISA