01130nam2-2200373---450-99000271628020331620060306084809.00-9616721-5-3000271628USA01000271628(ALEPH)000271628USA0100027162820060306h1995----km-y0itay50------baengUSa|||z|||001yy<<Vol. 3>> : <<The>> submicron MOSFETStanley WolfSunset BeachLattice Presscopyr. 1995XXI, 722 p.ill.24 cm0010001567472001Silicon processing for the VLSI EraCircuiti integrati VLSISilicone621.395WOLF,Stanley557421ITsalbcISBD990002716280203316621.395 WOL 319491 Ing.621.39500177246621.395 WOL 319492 Ing.621.39500177247621.395 WOL 319493 Ing.621.39500177248BKTECANNAMARIA9020060306USA010848Submicron MOSFET999991UNISA