01044nam0-22003491i-450-99000240974020331620050615132234.00-471-24141-5000240974USA01000240974(ALEPH)000240974USA0100024097420050324d2001----0engy01 baengUSa ||||0||||In Situ Real-Time Characterization of Thin Filmsedited by Orlando Auciello , Alan R. KraussNew YorkJohn Wiley and Sonscopyr. 2001263 p.ill.24 cmFilm sottili530.4275AUCIELLO,OrlandoKRAUSS,Alan R.ITDEAISBD20050310990002409740203316530.4275 INS18924 ING530.427500128286BKINGPATRY9020050324USA011314CHIARA9020050615USA011322In Situ Real-Time Characterization of Thin Films1065101UNISA