01381nam1-2200409---450-99000156747020331620040524110725.0000156747USA01000156747(ALEPH)000156747USA0100015674720040415d2000----km-y0enga50------baengUSy|||z|||001yySilicon processing for the VLSI EraStanley Wolf, Richard N. TauberSunset BeachLattice press2000-v.ill.24 cm.0019900013042602033162001 <<Vol. 2:>> Process integration0019900015673002033162001 <<Vol. 1:>> Process technology0019900027162802033162001 <<Vol. 3>> : <<The>> submicron MOSFET0019900028110802033162001 <<Vol. 4.>> : Deep-submicron process technologyCircuiti integrati VLSISilicone621.395WOLF,Stanley557421TAUBER,Richard N.8671ITsalbcISBD990001567470203316621.395 WOLIng.621.395BKTECMARIA1020040415USA011210RENATO9020040524USA011054RENATO9020040524USA011107Silicon processing for the VLSI Era937930UNISA