01192nam2-2200397---450-99000156730020331620040524110834.00-9616721-6-1000156730USA01000156730(ALEPH)000156730USA0100015673020040415d2000----km-y0itaa50------baengUSa|||z|||001yy<<Vol. 1:>> Process technologyStanley Wolf, Richard N. Tauber2. edSunset BeachLattice press2000XXXVI, 890 p.ill.24 cm.0010001567472001Silicon processing for the VLSI EraCircuiti integrati VLSISilicone621.395WOLF,Stanley557421TAUBER,Richerd N.560542ITsalbcISBDISBDISBD990001567300203316621.395 WOL 118192 Ing.621.39500132669BKTECMARIA1020040415USA011158RENATO9020040524USA011104RENATO9020040524USA011108Process technology937938UNISA