01059nam--2200373---450-99000154036020331620040326145952.0000154036USA01000154036(ALEPH)000154036USA0100015403620040326d1980----km-y0itay0103----baengUSa|||||||001yyElectron beam technology in microelectronic fabricationedited by George R. BrewerNew YorkAcademic Press1980XI, 362 p.ill.23 cm20012001001-------2001ElettronicaLitografia621.381BREWER,George RaymondITsalbcISBD990001540360203316XV B 32890219 L.M.XV BBKUMASIAV41020040326USA011459PATRY9020040406USA011747Electron beam technology in microelectronic fabrication940575UNISA