01195nam2-2200397---450-99000130426020331620040524120904.00-9616721-4-5000130426USA01000130426(ALEPH)000130426USA0100013042620031217d1990----km-y0enga50------baengUSy|||z|||001yy<<Vol. 2:>> Process integrationStanley WolfSunset BeachLattice press1990XXXI, 753 p.ill.24 cm.0010001567472001Silicon processing for the VLSI EraCircuiti integrati VLSISilicone621.395WOLF,Stanley557421ITsalbcISBD990001304260203316621.395 WOL 218195 Ing.621.39500132680BKTECMARIA1020031217USA010953PATRY9020040406USA011732RENATO9020040524USA011207RENATO9020040524USA011207RENATO9020040524USA011209Process integration929288UNISA