01249nam2-2200385li-450 99000022454020331620180312154910.00-201-14695-90022454USA010022454(ALEPH)000022454USA01002245420001109d1988----km-y0itay0103----baengUSIntroduction to microelectronic fabricationRichard C. JaegerReading (Mass.) [etc.]Addison-Wesleycopyr. 1988XIII, 232 p.ill.24 cmModular series on solid state devices500100224532001Modular series on solid state devicescircuiti integrati vlsiprogettazione621381JAEGER,Richard C.28080Sistema bibliotecario di Ateneo dell' Università di SalernoRICA990000224540203316621.381 73 JAE0000871BKTEC1991032520001110USA011714PATTY9020011030USA01172720020403USA011630PATRY9020040406USA011616Introduction to microelectronic fabrication1488585UNISA