01339nam2-2200385li-450 99000019943020331620180312154610.00-89838-259-90019943USA010019943(ALEPH)000019943USA01001994320001109d1989----km-y0itay0103----baengUSPolycrystalline silicon for integrated circuit applicationsby Ted KaminsBoston [etc.]Kluwer Academic Publisherscopyr. 1989XII, 290 p.ill.24 cm<<The>> Kluwer international series inengineering and computer science4500100199412001<<The>> Kluwer international series inengineering and computer sciencecircuiti integratimaterialisiliconiproprieta' elettriche621381.Kamins,Theodore I.1454Sistema bibliotecario di Ateneo dell' Università di SalernoRICA990000199430203316621.381 52 KAM0000915BKTEC1991042220001110USA01171320020403USA011627PATRY9020040406USA011614Polycrystalline silicon for integrated circuit applications1487003UNISA