01339nam2-2200385li-450 99000011545020331620180312154636.00-89838-259-90011545USA010011545(ALEPH)000011545USA01001154520001109d1989----km-y0itay0103----baengUSPolycrystalline silicon for integrated circuit applicationsby Ted KaminsBoston [etc.]Kluwer Academic Publisherscopyr. 1989XII, 290 p.ill.24 cm<<The>> Kluwer international series inengineering and computer science4500100115442001<<The>> Kluwer international series inengineering and computer sciencecircuiti integratimaterialisiliconiproprieta' elettriche621381.Kamins,Theodore I.1454Sistema bibliotecario di Ateneo dell' Università di SalernoRICA990000115450203316621.381 52 KAM0000915BKTEC1991042220001110USA01171120020403USA011619PATRY9020040406USA011609Polycrystalline silicon for integrated circuit applications1487003UNISA