01625nam0-2200529---450-990000080430203316200006260-201-14695-90008043USA010008043(ALEPH)000008043USA01000804320000626d1993----|||y0itay0103----baengUS||||||||001yyIntroduction to microelectronic fabricationRichard C. JaegerReadingAddison-Wesley1993XIII, 232 p.23 cmModular series on sold state devices52001Modular series on sold state devices5Circuiti VLSICircuiti integratiProgettazione621.38173JAEGER,Richard C.28080ITSALBCISBD990000080430203316621.38173 JAE14839 Ing.621.3817300003421BKTEC20000914USA01173720000919USA01104820000919USA01152120001019USA01105620001019USA01145420001019USA01150120001019USA01153920001024USA01151420001027USA01151920001027USA01152320001110USA01171020001124USA011208PATTY9020011030USA01172620020403USA011615PATRY9020040406USA011606Introduction to microelectronic fabrication1488585UNISA