01564nam 22004573 450 991102082670332120250912080409.090-485-7164-210.5117/9789048571635(CKB)40380521600041(MiAaPQ)EBC32291584(Au-PeEL)EBL32291584(OCoLC)1535965617(NjHacI)9940380521600041(EXLCZ)994038052160004120250912d2025 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierASML and Dutch Physics A History of the Advanced Research Center for Nanolithography (ARCNL), 2014-20241st ed.Amsterdam :Amsterdam University Press,2025.©2025.1 online resource (153 pages)90-485-7163-4 In 2014, the global market leader in advanced chipmaking machines ASML joined forces with NWO, AMOLF, the University of Amsterdam, and Vrije Universiteit to establish a new research institute in the Netherlands: the Advanced Research Center for Nanolithography (ARCNL).NanolithographyScience and industryNanolithography.Science and industry.621.381531Brookhuis Hein1844856MiAaPQMiAaPQMiAaPQBOOK9911020826703321ASML and Dutch Physics4432641UNINA