03897nam 2200661 a 450 991102043320332120200520144314.09786612346200978128234620812823462029780470017944047001794597804700654190470065419(CKB)1000000000357405(EBL)290997(OCoLC)476048340(SSID)ssj0000138763(PQKBManifestationID)11158392(PQKBTitleCode)TC0000138763(PQKBWorkID)10100704(PQKB)11779710(MiAaPQ)EBC290997(PPN)175354006(Perlego)2757716(EXLCZ)99100000000035740520060918d2007 uy 0engur|n|---|||||txtccrDielectric films for advanced microelectronics /edited by Mikhail Baklanov, Martin Green, and Karen MaexChichester, England ;Hoboken, NJ John Wiley & Sonsc20071 online resource (510 p.)Wiley series in materials for electronic and optoelectronic applicationsDescription based upon print version of record.9780470013601 0470013605 Includes bibliographical references and index.Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /A. Grill --Spin-on dielectric materials /Geraud Dubois, Robert D. Miller, Willi Volksen --Positron annihilation spectroscopy /David W. Gidley, Hua-Gen Peng, Richard Vallery --Structure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation /Christopher L. Soles ... [et al.] --Ellipsometric porosimetry /Mikhail R. Baklanov --Mechanical and transport properties of low-k dielectrics /J. L. Plawsky ... [et al.] --Integration of low-k dielectric films in damascene processes /R. J. O. M. Hoofman ... [et al.] --ONO structures and oxynitrides in modern microelectronics : material science, characterization and application /Yakov Roizin, Vladimir Gritsenko --Material engineering of high-k gate dielectrics /Akira Toriumi, Koji Kita --Physical characterization of ultra-thin high-k dielectric /T. Conard, H. Bender, W. Vandervorst --Electrical characterization of advanced gate dielectrics /Robin Degraeve ... [et al.] --Integration issues of high-k gate dielectrics /Yasuo Nara --Anisotropic conductive film (ACF) for advanced microelectronic interconnects /Yi Li, C. P. Wong.The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments madWiley series in materials for electronic and optoelectronic applications.Dielectric filmsMicroelectronicsMaterialsDielectric films.MicroelectronicsMaterials.621.381Baklanov Mikhail1628643Green Martin151860Maex Karen1756502MiAaPQMiAaPQMiAaPQBOOK9911020433203321Dielectric films for advanced microelectronics4421630UNINA