03762nam 22005894a 450 991100698220332120250519155614.01-282-02766-297866120276660-08-094698-40-8155-1931-1(CKB)1000000000000083(EBL)428701(OCoLC)468767278(SSID)ssj0000073114(PQKBManifestationID)11996759(PQKBTitleCode)TC0000073114(PQKBWorkID)10103276(PQKB)10481529(MiAaPQ)EBC428701(EXLCZ)99100000000000008320030811d2004 uy 0engur|n|---|||||txtccrThin film materials technology sputtering of compound materials /by Kiyotaka Wasa, Makoto Kitabatake, Hideaki AdachiNorwich, NY William Andrew Pub. ;Heidelberg Springerc20041 online resource (533 p.)Description based upon print version of record.0-8155-1483-2 Includes bibliographical references and index.Front Cover; Thin Film Materials Technology: Sputtering of Compound Materials; Copyright Page; Table of Contents; Chapter 1. Thin Film Materials and Devices; 1.1 THIN FILM MATERIALS; 1.2 THIN FILM DEVICES; REFERENCES; Chapter 2. Thin Film Processes; 2.1 THIN FILM GROWTH PROCESS; 2.2 THIN FILM DEPOSITION PROCESS; 2.3 CHARACTERIZATION; REFERENCES; Chapter 3. Sputtering Phenomena; 3.1 SPUTTER YIELD; 3.2 SPUTTERED ATOMS; 3.3 MECHANISMS OF SPUTTERING; REFERENCES; Chapter 4. Sputtering Systems; 4.1 DISCHARGE IN A GAS; 4.2 SPUTTERING SYSTEMS; 4.3 PRACTICAL ASPECTS OF SPUTTERING SYSTEMS; REFERENCESChapter 5. Deposition of Compound Thin Films5.1 OXIDES; 5.2 NITRIDES; 5.3 CARBIDES AND SILICIDES; 5.4 DIAMOND; 5.5 SELENIDES; 5.6 AMORPHOUS THIN FILMS; 5.7 SUPERLATTICE STRUCTURES; 5.8 ORGANIC THIN FILMS; 5.9 MAGNETRON SPUTTERING UNDER A STRONG MAGNETIC FIELD; REFERENCES; Chapter 6. Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films; 6.1 FERROELECTRIC MATERIALS AND STRUCTURES; 6.2 CONTROL OF STRUCTURE; 6.3 NANOMETER STRUCTURE; 6.4 INTERFACIAL CONTROL; REFERENCES; Chapter 7. Microfabrication by Sputtering; 7.1 CLASSIFICATION OF SPUTTER ETCHING7.2 ION-BEAM SPUTTER ETCHING7.3 DIODE SPUTTER ETCHING; 7.4 DEPOSITION INTO DEEP-TRENCH STRUCTURES; REFERENCES; Appendix; Table A.1 Electric Units, Their Symbols and Conversion Factors; Table A.2 Fundamental Physical Constants; List of Acronyms; IndexAn invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering proCathode sputtering (Plating process)Thin filmsCathode sputtering (Plating process)Thin films.621.3815/2Wasa Kiyotaka1824221Kitabatake Makoto1824222Adachi Hideaki1824223MiAaPQMiAaPQMiAaPQBOOK9911006982203321Thin film materials technology4391315UNINA