03319nam 2200541 a 450 991100668140332120200520144314.01-282-75509-997866127550951-282-01382-397866120138290-8155-1687-8(CKB)111056552536440(EBL)428519(OCoLC)476273852(MiAaPQ)EBC428519(EXLCZ)9911105655253644019950601d1995 uy 0engur|n|---|||||txtrdacontentcrdamediacrrdacarrierDiamond chemical vapor deposition nucleation and early growth stages /by Huimin Liu and David S. DandyPark Ridge, N.J. Noyes Publicationsc19951 online resource (207 p.)Description based upon print version of record.0-08-094618-6 0-8155-1380-1 Includes bibliographical references (p. 160-182) and index.Front Cover; Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages; Copyright Page; Contents; Chapter 1 General Introduction; Chapter 2 Atomic and Crystal Structures of Diamond; Chapter 3 Diamond CVD Techniques; 1.0 HOT-FILAMENT CVD; 2.0 PLASMA-ASSISTED CVD; 3.0 FLAME CVD; 4.0 GENERAL CHARACTERISTICS OF DIAMOND CVD PROCESSES; 5.0 SUMMARY; Chapter 4 Diamond Nucleation Mechanisms; 1.0 HOMOGENEOUS NUCLEATION-GAS-PHASE NUCLEATION; 2.0 HETEROGENEOUS NUCLEATION-SURFACE NUCLEATION; 3.0 SUMMARY; Chapter 5 Diamond Epitaxy, Oriented Growth, and Morphology Evolution; 1.0 EPITAXY2.0 ORIENTED AND TEXTURED GROWTH3.0 MORPHOLOGY EVOLUTION; 4.0 SUMMARY; Chapter 6 Effects of Surface Conditions on Diamond Nucleation; 1.0 SUBSTRATE MATERIALS; 2.0 SURFACE PRETREATMENT METHODS AND NUCLEATION ENHANCEMENT MECHANISMS; 3.0 SUMMARY; Chapter 7 Effects of Deposition Conditions on Diamond Nucleation; 1.0 SUBSTRATE TEMPERATURE; 2.0 GAS-PHASE ACTIVATION; 3.0 GAS PRESSURE AND FLOW RATE; 4.0 GAS COMPOSITION; 5.0 OXYGEN ADDITION; 6.0 SUMMARY; Chapter 8 Theoretical and Modeling Studies on Diamond Nucleation; 1.0 IDENTIFICATION OF NUCLEATION AND GROWTH MODE2.0 THEORETICAL STUDIES ON NUCLEATION THERMODYNAMICS3.0 THEORETICAL MODELING OF NUCLEATION KINETICS; 4.0 CLUES OF STRUCTURE, CHEMISTRY, AND SIZE OF DIAMOND NUCLEI; 5.0 SUMMARY; ReferencesThis book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing field.Diamonds, ArtificialChemical vapor depositionDiamonds, Artificial.Chemical vapor deposition.666/.88Liu Huimin1961-545699Dandy David S1822906MiAaPQMiAaPQMiAaPQBOOK9911006681403321Diamond chemical vapor deposition4389338UNINA