02445nam 2200577Ia 450 991100667620332120200520144314.01-282-02744-197866120274200-8155-1898-61-59124-252-5(CKB)111056552534282(OCoLC)309070649(CaPaEBR)ebrary10265692(SSID)ssj0000072955(PQKBManifestationID)11997224(PQKBTitleCode)TC0000072955(PQKBWorkID)10103200(PQKB)10424860(MiAaPQ)EBC3008683(BIP)46847702(EXLCZ)9911105655253428219871119d1988 uy 0engurcn|||||||||txtccrSemiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) /edited by Gary E. McGuirePark Ridge, N.J., U.S.A. Noyes Publicationsc19881 online resource (689 p.) Materials science and process technology seriesBibliographic Level Mode of Issuance: Monograph0-08-094454-X 0-8155-1150-7 Includes bibliographical references and index.This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.Materials science and process technology series.Integrated circuitsVery large scale integrationDesign and constructionHandbooks, manuals, etcSemiconductorsIntegrated circuitsVery large scale integrationDesign and constructionSemiconductors.621.395McGuire G. E27694MiAaPQMiAaPQMiAaPQBOOK9911006676203321Semiconductor materials and process technology handbook191725UNINA