03280nam 2200601Ia 450 991100666120332120241108152020.01-282-00281-397866120028160-8155-1771-81-59124-294-0(CKB)111056552535330(EBL)3008673(SSID)ssj0000072253(PQKBManifestationID)11980108(PQKBTitleCode)TC0000072253(PQKBWorkID)10093779(PQKB)10938729(MiAaPQ)EBC3008673(BIP)46733936(BIP)689249(EXLCZ)9911105655253533019891206d1990 uy 0engur|n|---|||||txtccrHandbook of semiconductor silicon technology /edited by William C. O'Mara, Robert B. Herring, Lee P. HuntPark Ridge, N.J., U.S.A. Noyes Publicationsc19901 online resource (816 p.)Materials science and process technology seriesDescription based upon print version of record.0-8155-1237-6 Includes bibliographical references and index.""Preface""; ""Contributors""; ""Contents""; ""1 Silicon Precursors: Their Manufacture and Properties""; ""2 Polysilicon Preparation""; ""3 Crystal Growth of Silicon""; ""4 Silicon Wafer Preparation""; ""5 Silicon Epitaxy""; ""6 Silicon Material Properties""; ""7 Oxygen, Carbon and Nitrogen in Silicon""; ""8 Carrier Lifetimes in Silicon""; ""9 Preparation and Properties of Polycrystalline-Silicon Films""; ""10 Silicon Phase Diagrams""; ""Index""This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.Materials science and process technology series.Electronic materials and process technology.SemiconductorsHandbooks, manuals, etcSilicon crystalsHandbooks, manuals, etcSemiconductorsSilicon crystals621.381/52O'Mara William C1822166Herring Robert B1822167Hunt Lee P(Lee Philip)1822168MiAaPQMiAaPQMiAaPQBOOK9911006661203321Handbook of semiconductor silicon technology4388245UNINA