03364nam 2200709 a 450 991100655330332120240617142004.097808194909331-62870-104-80-8194-9093-810.1117/3.924283(CKB)2670000000396662(EBL)1120176(OCoLC)854970277(SSID)ssj0000819238(PQKBManifestationID)11436082(PQKBTitleCode)TC0000819238(PQKBWorkID)10844581(PQKB)11054756(MiAaPQ)EBC1120176(OCoLC)801513077(CaBNVSL)gtp00552686(SPIE)9780819490933(PPN)237277484(EXLCZ)99267000000039666220120719d2012 fy 0engurbn#|||m|||atxtrdacontentcrdamediacrrdacarrierIntroduction to semiconductor manufacturing technology /Hong XiaoSecond editionBellingham, Wash. :SPIE,[2012]©20121 online resource (704 pages)SPIE Press monograph ;PM220Description based upon print version of record.9780819490926 0-8194-9092-X Includes bibliographical references.Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary.Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.SPIE Press monograph ;PM220.SemiconductorsDesign and constructionSemiconductor industrySemiconductorsDisseny i construcciólemacSemiconductorsIndústria i comerçlemacSemiconductorsDesign and construction.Semiconductor industry.SemiconductorsDisseny i construcció.SemiconductorsIndústria i comerç621.3815/2Xiao Hong524778Society of Photo-Optical Instrumentation Engineers.CaBNVSLCaBNVSLCaBNVSLBOOK9911006553303321Introduction to semiconductor manufacturing technology4391654UNINA