05079nam 2200577 a 450 991100653170332120200520144314.01-299-19290-40-08-052421-4(CKB)1000000000281395(EBL)1129805(OCoLC)829460506(SSID)ssj0000073115(PQKBManifestationID)11125430(PQKBTitleCode)TC0000073115(PQKBWorkID)10116584(PQKB)10270120(MiAaPQ)EBC1129805(EXLCZ)99100000000028139519901010d1991 uy 0engur|n|---|||||txtccrThin film processesII /edited by John L. Vossen, Werner KernBoston Academic Press, Inc.c19911 online resource (881 p.)Thin film processes ;2Description based upon print version of record.0-12-728251-3 Includes bibliographical references and index.Front Cover; Thin Film Processes II; Copyright Page; Table of Contents; List of Contributors; Preface; Part I; Chapter I-1. Introduction; I. The Organization of This Book; II. Other Film Deposition and Etching Processes; References; Part II; Chapter II-1. Glow Discharge Plasmas and Sources for Etching and Deposition; I. Introduction; II. Processing Plasmas; III. dc Diode Plasmas; IV. rf Diode Plasmas; V. Afterglow Plasmas; VI. Plasmas in the Presence of Magnetic Fields; VII. Magnetrons; VIII. Broad-Beam Ion Sources; IX. Measurements in Plasmas; X. Intrusive DiagnosticsXI. Nonintrusive DiagnosticsXII. Conclusion; References; Chapter II-2. Evaporation Processes; I. Introduction; II. Evaporation Process; III. Model of Film Growth in Evaporation Processes; IV. Theory and Mechanisms; V. Implementation of Evaporation Processes; VI. Deposition of Materials; VII. Materials Synthesized by Evaporation-Based Processes; VIII. Structure and Properties of Evaporated Films; IX. Conclusions; References; Chapter II-3. Molecular Beam Epitaxy; I. Introduction; II. Building Blocks of the MBE System; III. Basics of the Growth Process; IV. Trends and Future DevelopmentAcknowledgmentsReferences; Chapter II-4. Sputter Deposition Processes; I. Introduction; II. Sputter Sources; III. Sputter Deposition of Conducting Films; IV. Sputter Deposition of Dielectric Films; V. Sputter Coating Systems; VI. Emerging Technologies; VII. Concluding Remarks; References; Chapter II-5. The Cathodic Arc Plasma Deposition of Thin Films; I. Introduction; II. Ion Plating; III. The Cathodic Arc; IV. Emitted Material; V. Cathodic Arc Deposition; VI. Thin Film Deposition; VII. Applications; VIII. Conclusion; References; Part III; Chapter III-1. Thermal Chemical Vapor DepositionI. IntroductionII. Fundamentals of Thermal CVD; III. Production Reactor Systems; IV. CVD of Insulators and Dielectrics; V. CVD of Elemental and Compound Semiconductors; VI. CVD of Conductors; VII. Summary, Conclusions, and Future Outlook; References; Chapter III-2. OMVPE of Compound Semiconductors; I. Introduction; II. The OMVPE Technique and Growth System; III. Organometallic Compounds; IV. Gas-Phase and Surface Reaction Mechanisms; V. OMVPE Transport Phenomena and Modelling; VI. Materials Characterization and Development; VII. Fundamental Growth Issues; VIII. OMVPE GrowthIX. Impurities in OMVPE-Grown Compound SemiconductorsX. Summary; References; Chapter III-3. Photochemical Vapor Deposition; I. Introduction; I. Introduction; II. Fundamental Aspects of Photochemical Vapor Deposition; III. Reactors, Optical Sources, and Associated Equipment; IV. Metal Films; V. Semiconductors; VI. Dielectrics; VII. Conclusions; Acknowledgments; References; Chapter III-4. Sol-Gel Coatings; II. The Sol-Gel Process; III. Thin Film Formation; IV. Applications; V. SUMMARY; Acknowledgment; References; Part IV; Chapter IV-1. Plasma-Enhanced Chemical Vapor Deposition; I. IntroductionII. Summary of Plasma FundamentalsThis sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.Key Features* Provides an all-new sequel to the 1978 classic, Thin Film Processes* Introduces new topics, and severThin filmsThin films.621.381/52Vossen John L1824315Kern Werner1925-1823206MiAaPQMiAaPQMiAaPQBOOK9911006531703321Thin film processes4391414UNINA