03106nam 2200661Ia 450 991100483920332120200520144314.01-107-21756-31-283-00614-697866130061410-511-93202-20-511-92391-00-511-93338-X0-511-92817-30-511-92564-60-511-93389-40-511-93068-2(CKB)2560000000059663(EBL)605077(OCoLC)703137516(SSID)ssj0000470295(PQKBManifestationID)11299260(PQKBTitleCode)TC0000470295(PQKBWorkID)10410644(PQKB)10510466(UkCbUP)CR9780511933899(MiAaPQ)EBC605077(PPN)261364707(EXLCZ)99256000000005966320100903d2011 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierInertial MEMS principles and practice /Volker KempeCambridge ;New York Cambridge University Press20111 online resource (xiv, 475 pages) digital, PDF file(s)Title from publisher's bibliographic system (viewed on 05 Oct 2015).0-521-76658-3 Includes bibliographical references and index.Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index.A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.Microelectromechanical systemsInertial navigation systemsBioMEMSMicroelectromechanical systems.Inertial navigation systems.BioMEMS.629.04/5Kempe Volker1821813MiAaPQMiAaPQMiAaPQBOOK9911004839203321Inertial MEMS4387714UNINA