00898nam--2200349---450-99000591280020331620131129133854.0978-1-59954-042-9000591280USA01000591280(ALEPH)000591280USA0100059128020131129d2012----km-y0itay50------baengGB||||||||001yyOnly sonsFred MisurellaNew YorkBordighera2012188 p.21 cmVIA Folios79VIA Folios, 79BNCF816.6MISURELLA,Fred618230ITsalbcISBD990005912800203316VII.4.A. 80678587 G.VII.4.A.00344771BKUMACHIARA9020131129USA011338Only sons1072976UNISA04229nam 2200625Ia 450 991100475730332120200520144314.01-282-28497-597866122849770-08-053654-9(CKB)1000000000384006(EBL)452882(OCoLC)183633551(SSID)ssj0000072524(PQKBManifestationID)11980027(PQKBTitleCode)TC0000072524(PQKBWorkID)10115622(PQKB)10758558(MiAaPQ)EBC452882(EXLCZ)99100000000038400619980505d1998 uy 0engur|n|---|||||txtccrMicro mechanical systems principles and technology /edited by T. Fukuda and W. MenzAmsterdam ;New York Elsevier19981 online resource (278 p.)Handbook of sensors and actuators ;6Description based upon print version of record.0-444-82363-8 Includes bibliographical references.Front Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool PreparationWire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology - Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven ActuatorsPiezoelectric Actuators Mechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete MicrosystemThe Industrial Potential of Microsystem Technology The Importance of Standardization; OutlookIn ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four disHandbook of sensors and actuators ;6.Microelectromechanical systemsHandbooks, manuals, etcMicrotechnologyHandbooks, manuals, etcMicroelectromechanical systemsMicrotechnology620.11299621 21621Fukuda T(Toshio),1948-46541Menz W(Wolfgang)971799MiAaPQMiAaPQMiAaPQBOOK9911004757303321Micro mechanical systems4388472UNINA