02579nam 2200433zu 450 991100367840332120260212083715.0(CKB)38991972200041(IL-JeEL)9938991972200041(EXLCZ)993899197220004120250531|2025uuuu || |engur|||||||||||txtrdacontentcrdamediacrrdacarrierRetroreflex ellipsometry for nonplanar surfaces/Chia-Wei ChenKarlsruhe :KIT Scientific Publishing,2025.1 online resourceSchriftenreihe Automatische Sichtprüfung und BildverarbeitungBand 24.3-7315-1402-8 9783731514022 Includes bibliographical references (pages) and index.AbstractKurzfassungAcknowledgementsNotationAcronymsIntroductionRelated workPolarized light and ellipsometryRetroreflex ellipsometryMeasurement methods and uncertainty analysis for nonplanar surfacesResults and discussionConclusion and outlookBibliographyOwn publicationsList of FiguresList of Tables.Conventional ellipsometry is limited to flat surfaces because precise alignment is required, making measurements on curved samples difficult and time-consuming. This work proposes retroreflex ellipsometry, which overcomes these geometric limitations by using a retroreflector to return light along the same path. The method enables accurate, nondestructive ellipsometric measurements on nonplanar surfaces, allowing the determination of angles of incidence, tilt, refractive index, and film thickness. Experimental results confirm high accuracy and show strong potential for inline and in-situ industrial quality control, including the characterization of freeform optics and complex-shaped surfaces.Schriftenreihe Automatische Sichtprüfung und BildverarbeitungBand 24.EllipsometryApplicationsSurfaces (Technology)MeasurementOptical measurementsTechniquesScientific apparatus and instrumentsDesign and constructionEllipsometryApplications.Surfaces (Technology)Measurement.Optical measurementsTechniques.Scientific apparatus and instrumentsDesign and construction.Chen Chia-Wei1818821BOOK9911003678403321Retroreflex Ellipsometry for Nonplanar Surfaces4378253UNINA