02965oam 2200721I 450 991095646120332120240313121847.01-04-019221-10-429-08792-61-61583-947-X90-04-19095-310.1201/b12181 (CKB)2670000000311395(EBL)1109848(OCoLC)827211774(SSID)ssj0000595843(PQKBManifestationID)11392923(PQKBTitleCode)TC0000595843(PQKBWorkID)10575121(PQKB)10410158(Au-PeEL)EBL1109848(CaPaEBR)ebr10644872(CaONFJC)MIL501668(OCoLC)713869534(OCoLC)665139130(FINmELB)ELB145483(MiAaPQ)EBC1109848(EXLCZ)99267000000031139520180331d2010 uy 0engur|n|---|||||txtccrAdhesion aspects in MEMS-NEMS /edited by S. H. Kim, M. T. Dugger and K. L. Mittal1st ed.Leiden [Netherlands] ;Boston VSP2010Leiden ;Boston :Brill ;Biggleswade :Extenza Turpin [distributor],2010.1 online resource (424 p.)Description based upon print version of record.90-04-19094-5 Includes bibliographical references.pt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies.Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surfaceMicroelectromechanical systemsNanoelectromechanical systemsAdhesionSurfaces (Technology)Microelectromechanical systems.Nanoelectromechanical systems.Adhesion.Surfaces (Technology)621.381Kim Seong H1829228Dugger Michael T1829229Mittal K. L.1945-748276MiAaPQMiAaPQMiAaPQBOOK9910956461203321Adhesion aspects in MEMS-NEMS4398408UNINA