02469nam 2200553 a 450 991087745880332120200520144314.03-527-64713-91-299-15734-33-527-64712-0(CKB)2670000000328200(EBL)1120882(SSID)ssj0000884292(PQKBManifestationID)11471286(PQKBTitleCode)TC0000884292(PQKBWorkID)10940021(PQKB)10118380(MiAaPQ)EBC1120882(OCoLC)829253323(EXLCZ)99267000000032820020130225d2013 uy 0engur|n|---|||||txtccrSystem-level modeling of MEMS /edited by Tamara Bechtold, Gabriele Schrag, and Lihong FengWeinheim Wiley-VCH20131 online resource (564 p.)Advanced micro & nanosystemsDescription based upon print version of record.3-527-31903-4 Includes bibliographical references and index.pt. I. Physical and mathematical fundamentals -- pt. II. Lumped element modeling method for MEMS devices -- pt. III. Mathematical model order reduction for MEMS devices -- pt. IV. Modeling of entire microsystems -- pt. V. Software implementations.Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods. By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize readerAdvanced micro & nanosystemsMicroelectromechanical systemsMicroelectromechanical systems.621.381Bechtold T(Tamara)1761912Schrag Gabriele1761913Feng Lihong1761914MiAaPQMiAaPQMiAaPQBOOK9910877458803321System-level modeling of MEMS4201594UNINA