01721oam 2200541zu 450 991087694150332120230728233710.03-527-61929-1(CKB)1000000000687923(SSID)ssj0000715473(PQKBManifestationID)11434948(PQKBTitleCode)TC0000715473(PQKBWorkID)10701712(PQKB)10942001(EXLCZ)99100000000068792320160829d2000 uy engtxtccrHandbook of Semiconductor Technology[Place of publication not identified]Wiley VCH Imprint2000Bibliographic Level Mode of Issuance: Monograph3-527-29970-X SemiconductorsAnalysisSemiconductorsMaterialsSemiconductorsDesign and constructionElectronic structureDefectsSemiconductorsElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCSemiconductorsAnalysisSemiconductorsMaterialsSemiconductorsDesign and constructionElectronic structureDefectsSemiconductorsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.3815/2Jackson Kenneth ASchröter W(Wolfgang)PQKBBOOK9910876941503321Handbook of Semiconductor Technology4201389UNINA