02616nam 22005414a 450 991087676650332120200520144314.01-280-44912-897866104491250-470-34049-50-470-86679-90-470-86678-0(CKB)1000000000356036(EBL)257715(SSID)ssj0000241576(PQKBManifestationID)11176286(PQKBTitleCode)TC0000241576(PQKBWorkID)10300058(PQKB)11130054(MiAaPQ)EBC257715(OCoLC)86227317(EXLCZ)99100000000035603620051107d2006 uy 0engur|n|---|||||txtccrScanning Auger electron microscopy /[edited by] Martin Prutton, Mohamed M. El GomatiChichester, West Sussex, England ;Hoboken, NJ John Wiley & Sonsc20061 online resource (388 p.)Description based upon print version of record.0-470-86677-2 Includes bibliographical references and index.Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject IndexThis eagerly-awaited volume has been edited by two academic researchers with extensive and reputable experience in this field. Emphasis is given to the underlying science of the method of Auger microscopy, and its instrumental realization, the visualization and interpretation of the data in the sets of the images that form the output of the measurements and the methods used to quantify the images. Imaging artefacts in Auger microscopy and methods to correct them are also detailed. The authors describe the technique of Multi-Spectral Auger Microscopy (MULSAM) and demonstrate its advantages in mScanning Auger electron microscopyScanning Auger electron microscopy.502.8/25Prutton M49964El Gomati Mohamed M1750638MiAaPQMiAaPQMiAaPQBOOK9910876766503321Scanning Auger electron microscopy4185301UNINA