05370nam 22006374a 450 991087662620332120200520144314.01-280-72170-797866107217020-470-09363-30-470-09362-5(CKB)1000000000356528(EBL)281603(SSID)ssj0000247028(PQKBManifestationID)11216324(PQKBTitleCode)TC0000247028(PQKBWorkID)10195535(PQKB)10155980(MiAaPQ)EBC281603(OCoLC)85785026(PPN)188833323(EXLCZ)99100000000035652820060413d2006 uy 0engur|n|---|||||txtccrSmart material systems and MEMS design and development methodologies /Vijay K. Varadan, K.J. Vinoy, S. GopalakrishnanChichester, England ;Hoboken, NJ John Wiley & Sonsc20061 online resource (420 p.)Description based upon print version of record.0-470-09361-7 Includes bibliographical references and index.Smart Material Systems and MEMS; Contents; Preface; About the Authors; Part 1: Fundamentals; 1 Introduction to Smart Systems; 1.1 Components of a smart system; 1.1.1 'Smartness'; 1.1.2 Sensors, actuators, transducers; 1.1.3 Micro electromechanical systems (MEMS); 1.1.4 Control algorithms; 1.1.5 Modeling approaches; 1.1.6 Effects of scaling; 1.1.7 Optimization schemes; 1.2 Evolution of smart materials and structures; 1.3 Application areas for smart systems; 1.4 Organization of the book; References; 2 Processing of Smart Materials; 2.1 Introduction; 2.2 Semiconductors and their processing2.2.1 Silicon crystal growth from the melt2.2.2 Epitaxial growth of semiconductors; 2.3 Metals and metallization techniques; 2.4 Ceramics; 2.4.1 Bulk ceramics; 2.4.2 Thick films; 2.4.3 Thin films; 2.5 Silicon micromachining techniques; 2.6 Polymers and their synthesis; 2.6.1 Classification of polymers; 2.6.2 Methods of polymerization; 2.7 UV radiation curing of polymers; 2.7.1 Relationship between wavelength and radiation energy; 2.7.2 Mechanisms of UV curing; 2.7.3 Basic kinetics of photopolymerization; 2.8 Deposition techniques for polymer thin films2.9 Properties and synthesis of carbon nanotubesReferences; Part 2: Design Principles; 3 Sensors for Smart Systems; 3.1 Introduction; 3.2 Conductometric sensors; 3.3 Capacitive sensors; 3.4 Piezoelectric sensors; 3.5 Magnetostrictive sensors; 3.6 Piezoresistive sensors; 3.7 Optical sensors; 3.8 Resonant sensors; 3.9 Semiconductor-based sensors; 3.10 Acoustic sensors; 3.11 Polymeric sensors; 3.12 Carbon nanotube sensors; References; 4 Actuators for Smart Systems; 4.1 Introduction; 4.2 Electrostatic transducers; 4.3 Electromagnetic transducers; 4.4 Electrodynamic transducers4.5 Piezoelectric transducers4.6 Electrostrictive transducers; 4.7 Magnetostrictive transducers; 4.8 Electrothermal actuators; 4.9 Comparison of actuation schemes; References; 5 Design Examples for Sensors and Actuators; 5.1 Introduction; 5.2 Piezoelectric sensors; 5.3 MEMS IDT-based accelerometers; 5.4 Fiber-optic gyroscopes; 5.5 Piezoresistive pressure sensors; 5.6 SAW-based wireless strain sensors; 5.7 SAW-based chemical sensors; 5.8 Microfluidic systems; References; Part 3: Modeling Techniques; 6 Introductory Concepts in Modeling; 6.1 Introduction to the theory of elasticity6.1.1 Description of motion6.1.2 Strain; 6.1.3 Strain-displacement relationship; 6.1.4 Governing equations of motion; 6.1.5 Constitutive relations; 6.1.6 Solution procedures in the linear theory of elasticity; 6.1.7 Plane problems in elasticity; 6.2 Theory of laminated composites; 6.2.1 Introduction; 6.2.2 Micromechanical analysis of a lamina; 6.2.3 Stress-strain relations for a lamina; 6.2.4 Analysis of a laminate; 6.3 Introduction to wave propagation in structures; 6.3.1 Fourier analysis; 6.3.2 Wave characteristics in 1-D waveguides; References; 7 Introduction to the Finite Element Method7.1 IntroductionPresenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental conceMicroelectromechanical systemsSmart materialsMicroelectromechanical systems.Smart materials.621.381Varadan V. K.1943-719344Vinoy K. J(Kalarickaparambil Joseph),1969-1750938Gopalakrishnan S870974MiAaPQMiAaPQMiAaPQBOOK9910876626203321Smart material systems and MEMS4190461UNINA