01092oam 2200385zu 450 991087308260332120241212215119.0(CKB)111055184239960(SSID)ssj0000455245(PQKBManifestationID)12203243(PQKBTitleCode)TC0000455245(PQKBWorkID)10399326(PQKB)10427820(NjHacI)99111055184239960(EXLCZ)9911105518423996020160829d1996 uy engur|||||||||||txtccr1996 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]IEEE19961 online resource (426 pages)Bibliographic Level Mode of Issuance: Monograph9780780333710 0780333713 Process controlProcess control.658.562PQKBBOOK99108730826033211996 IEEE2507941UNINA