01317oam 2200409zu 450 991087297450332120241212215119.010.1109/ISSM.1995(CKB)111055184237866(SSID)ssj0000455364(PQKBManifestationID)12155332(PQKBTitleCode)TC0000455364(PQKBWorkID)10399634(PQKB)10203520(NjHacI)99111055184237866(EXLCZ)9911105518423786620160829d1995 uy engur|||||||||||txtccr1995 IEEE International Symposium on Semiconductor Manufacturing[Place of publication not identified]IEEE19951 online resource (350 pages)Bibliographic Level Mode of Issuance: Monograph9780780329287 0780329287 Computer integrated manufacturing systemsCongressesComputer integrated manufacturing systems670.285IEEE, Institute of Electrical and Electronics Engineers, Inc. StaffPQKBBOOK99108729745033211995 IEEE International Symposium on Semiconductor Manufacturing2526056UNINA