01122oam 2200385zu 450 991087293220332120241212215157.0(CKB)111085500349126(SSID)ssj0000454883(PQKBManifestationID)12194225(PQKBTitleCode)TC0000454883(PQKBWorkID)10398480(PQKB)11349612(NjHacI)99111085500349126(EXLCZ)9911108550034912620160829d2003 uy engur|||||||||||txtccr14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]IEEE20031 online resource (330 pages)Bibliographic Level Mode of Issuance: Monograph9780780376731 0780376730 Process controlCongressesProcess control670.42PQKBPROCEEDING991087293220332114th Annual IEEE2505572UNINA