01978oam 2200421zu 450 991087285760332120241212214916.010.1109/ICIPRM.1998(CKB)111026746720564(SSID)ssj0000455012(PQKBManifestationID)12210544(PQKBTitleCode)TC0000455012(PQKBWorkID)10398804(PQKB)11774357(NjHacI)99111026746720564(EXLCZ)9911102674672056420160829d1998 uy engur|||||||||||txtccr1998 International Conference on Indium Phosphide and Related Materials[Place of publication not identified]IEEE19981 online resource (800 pages)Bibliographic Level Mode of Issuance: Monograph9780780342200 0780342208 The papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in microelectronic test structure research, implementation, and applications. Also addressed are advances in device characterization, such as increased miniaturization, reduced operating voltages and reduced power requirements through improved measurement and test techniques. Topics highlighted include: Process Characterization, Dimensional Measurements, Interconnection, Material Characterization, Reliability, Device Characterization, and Statistics.Indium phosphideCongressesIndium phosphide621.38152IEEE, Institute of Electrical and Electronics Engineers, Inc. StaffPQKBPROCEEDING99108728576033211998 International Conference on Indium Phosphide and Related Materials2506463UNINA