01665oam 2200469zu 450 991087284910332120241212214905.0(CKB)111026746721648(SSID)ssj0000396609(PQKBManifestationID)12101415(PQKBTitleCode)TC0000396609(PQKBWorkID)10335795(PQKB)10706348(EXLCZ)9911102674672164820160829d1998 uy engtxtccrIWSM : 1998 3rd International Workshop on Statistical Metrology : June 7, 1998, Honolulu[Place of publication not identified]IEEE1998Bibliographic Level Mode of Issuance: Monograph9780780343382 0780343387 SemiconductorsStatistical methodsCharacterizationCongressesSemiconductorsMeasurementCongressesElectrical EngineeringHILCCElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCSemiconductorsStatistical methodsCharacterizationSemiconductorsMeasurementElectrical EngineeringElectrical & Computer EngineeringEngineering & Applied Sciences621.3815/2IEEE Electron Devices SocietyInternational Workshop on Statistical MetrologyPQKBPROCEEDING9910872849103321IWSM : 1998 3rd International Workshop on Statistical Metrology : June 7, 1998, Honolulu2506155UNINA