01703oam 2200493zu 450 991087280230332120241212215138.0(CKB)111055184257824(SSID)ssj0000395979(PQKBManifestationID)12190366(PQKBTitleCode)TC0000395979(PQKBWorkID)10460990(PQKB)11157496(EXLCZ)9911105518425782420160829d2002 uy engtxtccr2002 IEEE/LEOS International Conference on Optical MEMs : conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland[Place of publication not identified]IEEE2002Bibliographic Level Mode of Issuance: Monograph9780780375956 0780375955 Microelectromechanical systemsCongressesOptoelectronic devicesCongressesOptical MEMSCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptoelectronic devicesOptical MEMSElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.381Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)IEEE/LEOS International Conference on Optical MEMSPQKBPROCEEDING99108728023033212002 IEEE2247189UNINA