01990oam 2200517zu 450 991087273760332120210807003447.0(CKB)111026746711604(SSID)ssj0000455360(PQKBManifestationID)12166328(PQKBTitleCode)TC0000455360(PQKBWorkID)10399633(PQKB)11143466(EXLCZ)9911102674671160420160829d1995 uy engtxtccrIEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995[Place of publication not identified]Institute of Electrical and Electronics Engineers1995Bibliographic Level Mode of Issuance: Monograph0-7803-2503-6 Electromechanical devicesCongressesMicroelectronicsCongressesDetectorsCongressesActuatorsCongressesElectrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCElectromechanical devicesCongressesMicroelectronicsCongressesDetectorsCongressesActuatorsCongressesElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied SciencesIEEE Robotics and Automation SocietyThe American Society of Mechanical EngineersAmerican Society of Mechanical Engineers Dynamic Systems and Control Division,IEEE Workshop on Micro Electro Mechanical Systems(1995 :Amsterdam, the Netherlands)PQKBBOOK9910872737603321IEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 19952512190UNINA