01178oam 2200397zu 450 991087273420332120241212215148.0(CKB)111055184252416(SSID)ssj0000454449(PQKBManifestationID)12173447(PQKBTitleCode)TC0000454449(PQKBWorkID)10397595(PQKB)10981991(NjHacI)99111055184252416(EXLCZ)9911105518425241620160829d2001 uy engur|||||||||||txtccr2001 IEEE International Conference on Plasma Science[Place of publication not identified]I E E E20011 online resource illustrationsBibliographic Level Mode of Issuance: Monograph9780780371415 0780371410 Includes bibliographical references.Plasma chemistryPlasma chemistry.541.0PQKBPROCEEDING99108727342033212001 IEEE International Conference on Plasma Science2529995UNINA