01191oam 2200397zu 450 991087270180332120210807003359.0(CKB)111055184252432(SSID)ssj0000454009(PQKBManifestationID)12140485(PQKBTitleCode)TC0000454009(PQKBWorkID)10487425(PQKB)11068479(NjHacI)99111055184252432(EXLCZ)9911105518425243220160829d2002 uy engur|||||||||||txtccr2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]I E E E20021 online resource (440 pages) illustrationsBibliographic Level Mode of Issuance: Monograph0-7803-7158-5 Includes bibliographical references.SemiconductorsSemiconductors.621.3IEEE, Electron Devices Society StaffPQKBPROCEEDING99108727018033212002 IEEE2247189UNINA