01902oam 2200529zu 450 991087267080332120241212214905.0(CKB)111026746722770(SSID)ssj0000395351(PQKBManifestationID)12144962(PQKBTitleCode)TC0000395351(PQKBWorkID)10455668(PQKB)11072355(EXLCZ)9911102674672277020160829d1998 uy engtxtccrIon implantation technology--1998 : 1998 International Conference on Ion Implantation Technology : Proceedings, Kyoto, Japan, June 22-26, 1998[Place of publication not identified]The Institute of Electrical and Electronics Engineers Inc1998Bibliographic Level Mode of Issuance: Monograph9780780345386 078034538X SemiconductorsCongressesIon implantationCongressesSemiconductor dopingCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCSemiconductorsIon implantationSemiconductor dopingElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.3815/2Yamada IMatsuo JTakaoka GIEEE Electron Devices SocietyInternational Conference on Ion Implantation TechnologyPQKBPROCEEDING9910872670803321Ion implantation technology--1998 : 1998 International Conference on Ion Implantation Technology : Proceedings, Kyoto, Japan, June 22-26, 19982495968UNINA