01150nam 2200349zn 450 991087266870332120241212214929.0(CKB)111026746725024(EXLCZ)9911102674672502420220628d1998 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrier1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) /IEEE Electron Devices Society. Taipei ChapterPiscataway, N.J :IEEE Computer Society Press,1998.1 online resource9780780351790 0780351797 1998 Semiconductor Manufacturing Technology Workshop SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, 1998Electronic industriesCongressesElectronic industries621.381MiAaPQMiAaPQMiAaPQPROCEEDING99108726687033211998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133)2513415UNINA