01212oam 2200397zu 450 991087265250332120241212214923.0(CKB)111026746725046(SSID)ssj0000450663(PQKBManifestationID)12229855(PQKBTitleCode)TC0000450663(PQKBWorkID)10444426(PQKB)11474551(NjHacI)99111026746725046(EXLCZ)9911102674672504620160829d1999 uy engur|||||||||||txtccrIEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop, 1999[Place of publication not identified]I E E E19991 online resource ([xi], 455 pages) illustrationsBibliographic Level Mode of Issuance: Monograph9780780352179 0780352173 Process controlCongressesProcess control670.42IEEE, Institute of Electrical and Electronics Engineers, Inc. StaffPQKBPROCEEDING9910872652503321IEEE878179UNINA