01326oam 2200433zu 450 991087261600332120241212214859.010.1109/ASMC.1998(CKB)111026746721676(SSID)ssj0000455013(PQKBManifestationID)12149050(PQKBTitleCode)TC0000455013(PQKBWorkID)10398738(PQKB)10549226(NjHacI)99111026746721676(EXLCZ)9911102674672167620160829d1998 uy engur|||||||||||txtccr1998 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]IEEE19981 online resource (500 pages) illustrationsBibliographic Level Mode of Issuance: Monograph9780780343801 0780343808 Process controlCongressesSemiconductor industryCongressesProcess controlSemiconductor industry670.42Institute of Electrical and Electronics Engineers, Inc. StaffPQKBPROCEEDING99108726160033211998 IEEE2508366UNINA