01716oam 2200505zu 450 991087251220332120241212214932.0(CKB)111026746728490(SSID)ssj0000395977(PQKBManifestationID)12189676(PQKBTitleCode)TC0000395977(PQKBWorkID)10456905(PQKB)11454847(EXLCZ)9911102674672849020160829d2000 uy engtxtccr2000 IEEE/LEOS International Conference on Optical MEMS : Sheraton Kauai, Resort, Kauai, Hawaii, 21-24 August, 2000[Place of publication not identified]IEEE2000Bibliographic Level Mode of Issuance: Monograph9780780362574 0780362578 Microelectromechanical systemsCongressesOptoelectronic devicesCongressesOptical MEMSCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptoelectronic devicesOptical MEMSElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.381Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)Optical Society of AmericaInternational Conference on Optical MEMSPQKBPROCEEDING99108725122033212000 IEEE2353420UNINA